发明名称 Compound semiconductor devices and methods for fabricating the same
摘要 According to the present invention, a method for manufacturing a compound semiconductor comprises: forming a graphene-derived material layer on either a first selected substrate or a first selected compound semiconductor layer; forming a second compound semiconductor layer of at least one layer on at least said graphene-derived material layer, and changing the graphene-derived material layer so as to separate said second compound semiconductor layer of at least one layer.
申请公布号 US9214596(B2) 申请公布日期 2015.12.15
申请号 US201113880708 申请日期 2011.10.26
申请人 LG Siltron Inc.;Kumoh National Institute of Technology Industry-Academic Cooperation Foundation 发明人 An Sung-Jin;Lee Dong-Gun;Kim Seok-Han
分类号 H01L33/02;H01L21/02;H01L33/00;H01L33/12;H01L21/36;H01L29/06;B82Y40/00 主分类号 H01L33/02
代理机构 Lewis Roca Rothgerber LLP 代理人 Lewis Roca Rothgerber LLP
主权项 1. A method for manufacturing a compound semiconductor, the method comprising: forming a graphene-derived material layer on one of a first substrate and a first compound semiconductor layer; forming at least one layer of second compound semiconductor layers on the graphene-derived material layer; and transforming the graphene-derived material layer into a graphene oxide layer to separate at least one layer of the second compound semiconductor layers from the first compound semiconductor layer.
地址 KR