发明名称 |
Compound semiconductor devices and methods for fabricating the same |
摘要 |
According to the present invention, a method for manufacturing a compound semiconductor comprises: forming a graphene-derived material layer on either a first selected substrate or a first selected compound semiconductor layer; forming a second compound semiconductor layer of at least one layer on at least said graphene-derived material layer, and changing the graphene-derived material layer so as to separate said second compound semiconductor layer of at least one layer. |
申请公布号 |
US9214596(B2) |
申请公布日期 |
2015.12.15 |
申请号 |
US201113880708 |
申请日期 |
2011.10.26 |
申请人 |
LG Siltron Inc.;Kumoh National Institute of Technology Industry-Academic Cooperation Foundation |
发明人 |
An Sung-Jin;Lee Dong-Gun;Kim Seok-Han |
分类号 |
H01L33/02;H01L21/02;H01L33/00;H01L33/12;H01L21/36;H01L29/06;B82Y40/00 |
主分类号 |
H01L33/02 |
代理机构 |
Lewis Roca Rothgerber LLP |
代理人 |
Lewis Roca Rothgerber LLP |
主权项 |
1. A method for manufacturing a compound semiconductor, the method comprising:
forming a graphene-derived material layer on one of a first substrate and a first compound semiconductor layer; forming at least one layer of second compound semiconductor layers on the graphene-derived material layer; and transforming the graphene-derived material layer into a graphene oxide layer to separate at least one layer of the second compound semiconductor layers from the first compound semiconductor layer. |
地址 |
KR |