| 摘要 |
PROBLEM TO BE SOLVED: To efficiently cancel a wraparound drive signal as noise to a monitor and detection signal in a vibration type angular velocity sensor. SOLUTION: The angular velocity sensor S1 has a board 10 stuck by sandwiching an oxidation film 13 by first and second silicon boards 11, 12. A weight part 30 capable of vibration in mutually orthogonal x and y directions, a drive electrode 40 for drive signal application to the weight part 30, a monitor electrode 60 for monitor signal detection for the drive vibration of the weight part 30, and a detection electrode 50 for detection of a detection signal during angular velocity application are used on the second silicon board 12. A capacity formed with the drive electrode 40 forms a dummy electrode 70 being the same as a parasite capacity formed among the monitor electrode 60, the detection electrode 50 and the drive electrode 40 on the second silicon board 12, and a noise component due to the drive signal appearing to the monitor and detection signal is canceled by a signal from the dummy electrode 70. |
