发明名称 FOCUS DETECTION UNIT AND OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a focus detection unit capable of highly accurately performing focusing, and an optical device.SOLUTION: The focus detection unit according to one embodiment of the invention is the focus detection unit for bringing the image of an object formed by an optical system into focus and includes a first emission part, a second emission part, and a projection optical system. The first emission part includes a first light modulation element which generates a first pattern image on the basis of incident light and emits the generated first pattern image. The second emission part includes a second light modulation element which generates a second pattern image on the basis of the incident light and emits the generated second pattern image. The projection optical system projects the emitted first and second pattern images, so as to obtain a predetermined positional relation in the focusing position of the optical system, respectively.
申请公布号 JP2015225238(A) 申请公布日期 2015.12.14
申请号 JP20140110362 申请日期 2014.05.28
申请人 MITSUTOYO CORP 发明人 MORIUCHI EISUKE;NAGAHAMA TATSUYA;SHISHIDO YUKO
分类号 G02B7/28;G02B7/34;G02B21/26 主分类号 G02B7/28
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