| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device in which a grinding wheel can be suppressed from increasing in size and a grinding method for a rectangular substrate.SOLUTION: A grinding device 2, which grinds a front face or a rear face of a rectangular substrate, comprises: a chuck table 58 having a holding surface 58a for suctioning and holding the rectangular substrate; grinding means 28 that rotatably supports a grinding wheel 38 for grinding the rectangular substrate held on the chuck table; a grinding unit feeding mechanism 16 that grinds and feeds the grinding means in a direction vertical to the holding surface of the chuck table; and Y-axis moving means; and X-axis moving means. The grinding wheel includes a wheel pedestal and a grindstone for grinding annularly arranged on an outer periphery part of a lower surface of the wheel pedestal. An outer diameter of the annularly arranged grinding grindstone is set to be smaller than short sides of the rectangular substrate. |
