| 摘要 |
The present invention relates to a method for recovering fluorine contained in waste water generated from an etching process. More specifically, the method for recovering fluorine contained in waste water generated from an etching process comprises: an anion exchange resin treating step for circulating waste water generated in an etching process through a tank in which anion exchange resins are filled; a fluorine separation step for separating fluorine, adsorbed onto the anion exchange resins through the anion exchange resin treating step, by using an aqueous NaOH solution; a cation exchange resin treating step for circulating the aqueous NaOH solution, in which the fluorine separated through the fluorine separation step is contained, through a tank in which cation exchange resins are filled; and a concentration step for concentrating a mixture which has passed through the cation exchange resins through the cation exchange resin treating step. The method for recovering fluorine composed of the processes: recovers fluorine at a high recovery rate by circulating waste water generated in the etching process sequentially through the anion and cation exchange resins, thereby preventing secondary environmental contamination; and reuses the recovered fluorine in the etching process, thereby reducing costs of the etching process. |
