| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the eccentricity and inclination of a surface of an optical element.SOLUTION: Surface parts 1.1 to 1.3 used optically at least all of the surface of an optical element 1 or corresponding to a frame, and a reference surface of the optical element 1 are extracted over the whole surface and put on record and referred to each other on common coordinates. In any case, surface shape deviations of the surface parts 1.1 to 1.3 and the reference surface are calculated for an intended surface, and positions of the surface parts 1.1 to 1.3 and the reference surface are calculated from the respective surface shape deviations on the common coordinates. At least one inclination and at least one eccentricity are calculated from positions corresponding to shapes of the surface parts 1.1 to 1.3 and the reference surface on the coordinates. Furthermore, the present invention relates to a device 2 for measuring the eccentricity D and inclination V of the optical element 1. |
