TRANSPARENT CONDUCTIVE FILM AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film capable of achieving a low resistance characteristic of a transparent conductive layer.SOLUTION: In a transparent conductive film including a polymer film substrate, and a transparent conductive layer formed by a sputtering method using sputtering gas containing argon on at least one surface side of the polymer film substrate, the existence atomic weight of argon atoms in the transparent conductive layer is 0.24 atomic% or less, the existence atomic weight of hydrogen atoms in the transparent conductive layer is 13×10atoms/cmor less, and the specific resistance of the transparent conductive layer is 1.1×10&OHgr;-cm or higher and 2.8×10&OHgr;-cm or lower.