MULTIPLE PATTERN MASK OF ION IMPLANTATION AND METHOD OF ION IMPLANTATION USING THE SAME

摘要

The present invention relates to a multi-pattern mask for ion implantation, prepared on a substrate and controlling ion penetration into the substrate. The multi-pattern mask includes: a base part preventing the ion; and a pattern part exposing at least a part of the substrate so as to allow the ion to penetrate the substrate. Two or more pattern parts are prepared in different sizes or shapes.