| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier device which suppresses damage and dust emission of a sheet substrate and adjusts accurately and smoothly the position of the sheet substrate in the width direction and a pattern formation method.SOLUTION: A carrier device 12 carries a long flexible substrate P in the longitudinal direction and includes a pair of guide rollers GR1 and GR2 which are arranged separately on the carrying path for the substrate P and folds the carrier path for the substrate P in a state where a specified tensile force is applied in the longitudinal direction and a tensile force distribution adjustment part 60 which adjusts the distribution of the tensile force T to be applied to the substrate P in the width direction intersecting the longitudinal direction, in a state of not contacting with the substrate P or a low-friction state. |
