发明名称 MEMS STRUCTURE
摘要 This MEMS structure (1) comprises: a substrate (2); a supporting portion (3) disposed on the substrate (2); a fixed electrode (10) fixed on the substrate (2); a movable portion (30) disposed to be separated from the fixed electrode (10); a torsion bar (31) that connects the supporting portion (3) and the movable portion (30) and that pivotally supports the movable portion (30) at one end of the movable portion (30); a ceiling portion (50) that is spaced away from the movable portion (30) by a gap and that covers the movable portion (30); and an opposing electrode (52) that is disposed on the ceiling portion (50) and that faces the fixed electrode (10) across the movable portion (30).
申请公布号 WO2015186727(A1) 申请公布日期 2015.12.10
申请号 WO2015JP66005 申请日期 2015.06.03
申请人 MURATA MANUFACTURING CO., LTD. 发明人 OKAMI, TSUYOSHI;TSUJI, NOBUAKI;MATSUOKA, JUNYA;UEYA, YUKI;MIZOTA, TAKASHI
分类号 B81B3/00;G01C19/5762;G01C19/5769 主分类号 B81B3/00
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