发明名称 METHOD FOR ETCHING NON-CONDUCTIVE SUBSTRATE SURFACES
摘要 An etching composition for non-conductive substrates such as polyester, polyether, polyimide, polyurethane, epoxy resin, polysulfone, polyethersulfone, polyetherimide, and polyamide, comprising a halogenide and/or nitrate of a metal selected from the group consisting of Na, Mg, Al, Si, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Ca, Zn, and combinations thereof such as FeCl<SUB>3</SUB>, FeCl<SUB>2</SUB>, TiCl<SUB>3</SUB>, CaCl<SUB>2</SUB>, CuCl<SUB>2</SUB>, CrCl<SUB>3</SUB>, ZnCl<SUB>2</SUB>, MgCl<SUB>2</SUB>, MnCl<SUB>2</SUB>, and Cr(NO<SUB>3</SUB>)<SUB>3</SUB>; and a related method for etching.
申请公布号 US2007099425(A1) 申请公布日期 2007.05.03
申请号 US20060554100 申请日期 2006.10.30
申请人 ENTHONE INC. 发明人 SCHILDMANN MARK P.;PRINZ ULRICH;KONIGSHOFEN ANDREAS
分类号 H01L21/302 主分类号 H01L21/302
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