| 摘要 |
A polycrystalline silicon rod is synthesized by the Siemens process (S101). A plastic bag the inside of which has been cleaned is covered over the polycrystalline silicon rod from the inside a reactor so that the polycrystalline silicon rod is contained in the plastic bag (S103), after which the polycrystalline silicon rod is taken out of the reactor (S104), and thermally sealed to be stored in a sealed state (S105). According to the present invention, processes such as cleaning, etching, and washing that are conventionally considered essential are no longer always necessary, so fluorine ions, nitrate ions, and nitrogen dioxide ions remaining on the surface can all be kept at less than 0.2 ppbw. Further, by covering with a plastic bag, the level of metal contamination is significantly reduced. Moreover, handling the polycrystalline silicon rod according to the present invention prevents surface contamination from proceeding even when stored for long periods of time. |
