发明名称 Improving metal contacts to group IV semiconductors by inserting interfacial atomic monolayers
摘要 A method of forming an electrical contact, comprising depositing, on a surface of a group IV semiconductor, which has been prepared so as to include atoms of a first group V material near the surface, a monolayer of a second group V material, the atoms of the second group V material being epitaxially aligned with a lattice structure of the semiconductor, and depositing a metal on the monolayer of the second group V material. This results in the specific contact resistance of the metal being reduced. In one embodiment the metal may be a ferromagnetic metal. The application further discloses the use of III-V bi layers as well as group III monolayers.
申请公布号 GB2526951(A) 申请公布日期 2015.12.09
申请号 GB20150011957 申请日期 2012.10.18
申请人 ACORN TECHNOLOGIES, INC 发明人 WALTER A HARRISON;PAUL A CLIFTON;ANDREAS GOEBEL;R STOCKTON GAINES
分类号 H01L21/285;H01L29/04 主分类号 H01L21/285
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