MASS SPECTROMETER AND MASS IMAGE ANALYZING SYSTEM

摘要

To provide a mass spectrometer capable of performing high-sensitivity measurement using water molecules. The mass spectrometer has a chamber in which a sample is disposed, an irradiation unit for emitting particles to the sample, and an extraction electrode which leads secondary ions emitted from the sample to a mass spectrometry unit, in which the irradiation unit switches a first mode of emitting primary ions for causing the secondary ions to be emitted from the sample and a second mode of emitting particles containing water molecules to be made to adhere to the sample and emits the particles to the sample.