发明名称 CARBON FILM LAMINATE
摘要 An object of the present invention is to solve a problem such as a small crystal size, which is the issue of a conventional method for formation of a film of graphene by a thermal CVD technique using a copper foil as a substrate, and thus providing a carbon film laminate in which graphene having a larger crystal size is formed. The carbon film laminate is configured to include a sapphire (0001) single crystal having a surface composed of terrace surfaces which are flat at the atomic level, and atomic-layer steps, a copper (111) single crystal thin film formed by epitaxial growth on the substrate, and graphene deposited on the copper (111) single crystal thin film, and thus enabling formation of graphene having a large crystal size.
申请公布号 EP2540862(A4) 申请公布日期 2015.12.09
申请号 EP20110747486 申请日期 2011.02.25
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 HASEGAWA, MASATAKA;ISHIHARA, MASATOU;KOGA, YOSHINORI;KIM, JAEHO;TSUGAWA, KAZUO;IIJIMA, SUMIO
分类号 C23C16/26;B82Y30/00;B82Y40/00;C01B31/02;C01B31/04;C01B31/20;C23C16/02;C30B29/02;C30B29/04;C30B29/20 主分类号 C23C16/26
代理机构 代理人
主权项
地址