剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体,申请号JP20120139085-传众专利搜索

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发明名称	剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
摘要
申请公布号	JP5830440(B2)	申请公布日期	2015.12.09
申请号	JP20120139085	申请日期	2012.06.20
申请人	東京エレクトロン株式会社	发明人	岩下泰治;平河修;相馬康孝
分类号	H01L21/677;B65G49/07;H01L21/683	主分类号	H01L21/677
代理机构		代理人
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