Cooling block forming electrode

摘要

The present invention is a cooling block that forms an electrode for generating a plasma for use in a plasma process, and includes a channel for a cooling liquid, the cooling block comprising: a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid; and a diffusion bonding layer, in which zinc is diffused in aluminum, and an anti-corrosion layer of a zinc oxide film, the layers being formed by interposing zinc between the first and second base materials, and by bonding the first and second base materials with zinc interposed therebetween in a heating atmosphere containing oxygen.

主权项

1. A cooling block that cools an electrode for generating a plasma for use in a plasma process, the cooling block comprising:
a first base member consisting essentially of aluminum, a second base member consisting essentially of aluminum, a diffusion bonding layer bonding the first base member and the second base member together so that a side of the first base member faces a side of the second base member, wherein at least one of said side of the first base member and said side of the second base member provides convex portions forming a fluid channel for introduction of a cooling medium, the first base member and the second base member have a gas supply hole formed therethrough for introduction of a gas, and the diffusion bonding layer bonds the first base member and the second base member together at the convex portions, and consists essentially of aluminum from the first and second base members, a brazing material consisting essentially of nickel provided by the first base member, and anti-corrosion material consisting essentially of zinc provided by the second base member, and wherein the cooling block further comprises an anti-corrosion layer formed in the fluid channel, the anti-corrosion layer consisting essentially of an oxide of the aluminum from the first and the second base members, the nickel from the brazing material, and the zinc from the anti-corrosion material.