Coil section assembly for simulating circular coils for vacuum devices

摘要

The invention relates to a vacuum treatment chamber, comprising a coil arrangement for generating a magnetic field in the chamber, wherein the coil arrangement comprises at least one first coil section and a second coil section, wherein the first coil section and the second coil section are arranged adjacent to each other in cross-section and preferably in one plane, such that at least a partial section of the first coil substantially follows the course of a partial section of the second coil, wherein the spacing of the first partial section from the second partial section is at least one order of magnitude smaller than the cross-section of the optionally smaller coil section.

主权项

1. A vacuum treatment chamber, comprising:
a coil arrangement for generating a magnetic field within the chamber, the coil arrangement comprising at least one lower coil configured as a multi-section coil, the multi-section coil comprising at least one first coil section and a second coil section, the first coil section and the second coil section being arranged adjacent to each other in cross-section and in one plane, at least one segment of the first coil section essentially following a contour of one segment of the second coil section, a distance between the segment of the first coil section and the segment of the second coil section being smaller than a cross-section of a smaller one of the first coil section and the second coil section; and a front door, the first coil section being mounted on the bottom of the front door and configured to tilt together with the front door away from the chamber.