MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT AND METHOD OF MANUFACTURING THE SAME

摘要

Disclosed herein is a MEMS component including: a membrane; a mass body connected to the membrane; and a support connected to the membrane and supporting the mass body in a floated state to be displaced, wherein the membrane has an upper electrode and an upper piezoelectric material disposed on one side thereof and has a lower electrode and a lower piezoelectric material disposed on the other side thereof, based on an insulating adhesive layer.

主权项

1. A MEMS component, comprising:
a membrane; a mass body connected to the membrane; and a support connected to the membrane and supporting the mass body in a floated state to be displaced, wherein the membrane has an upper electrode, an upper piezoelectric material, a lower electrode, a lower piezoelectric material and insulating adhesive layer and, the upper electrode and the upper piezoelectric material are disposed on one side of the insulating adhesive layer and the lower electrode and the lower piezoelectric material are disposed on the other side of the insulating adhesive layer.