METHODS FOR FABRICATING APPARATUS HAVING A HERMETIC SEAL

摘要

Apparatus and Methods for fabricating apparatus having a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.

主权项

1. A method of sealing a sensor to a housing comprising:
providing a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity and a second cavity wherein both cavities have an inner wall, outer wall and cavity bottom and both cavities extend down into the housing from the top and surround the hole wherein the outer wall of the first cavity is the inner wall of the second cavity. providing a seal with a top and bottom and a hole that passes through the seal from the top to the bottom wherein the inner wall surrounds and forms the hole and the outer wall surrounds the inner wall and is coupled to the inner wall by the bottom. pressing the seal inside the first cavity such that the bottom of the seal is pressed against the bottom of the first cavity; providing an isolation member coupled to the sensor; placing the isolation member down into the first cavity such that the isolation member extends down between the inner wall and outer wall of the seal. placing a collar down into the second cavity and pressing the collar down such that it deforms the inner wall of the second cavity and seals the housing to the isolation member.