发明名称 Semiconductor Storage Device and Manufacturing Method
摘要 <p>The application discloses a semiconductor storage device (100, 200, 300) comprising a semiconductor substrate (112) having a first region of a first conductivity type in between respective regions of an opposite conductivity type, at least the first region being covered by a first dielectric layer, a polysilicon floating gate (122) placed on the first dielectric layer over the first region, said floating gate being surrounded by an insulating material (124); and a metal control gate structure (126, 226, 326) adjacent to the polysilicon floating gate, the metal control gate structure being capacitively coupled to said floating gate. The application further discloses a method of manufacturing such a semiconductor storage device (100, 200, 300).</p>
申请公布号 EP2251907(B1) 申请公布日期 2015.12.02
申请号 EP20090160221 申请日期 2009.05.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 AKIL, NADER;VAN DUUREN, MICHIEL J.
分类号 H01L29/788;H01L29/423 主分类号 H01L29/788
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