发明名称 露光装置及び遮光板
摘要 An exposure mask is provided with a plurality of pattern regions that correspond to display panels. A micro-lens array has first and second micro-lens array chips in the direction perpendicular to the scanning direction so that the chips partially overlap with each other in the direction perpendicular to the scanning direction. A light-shielding plate shields a part of these micro-lens array chips (22a) from light. An opening in the light-shielding plate restricts transmission of light through the micro-lens array chips such that the first micro-lens array chip exposes only two pattern regions and the second micro-lens array chip exposes only three other pattern regions. This makes it possible to expose a panel efficiently and inexpensively when substrates of different cell layouts are exposed.
申请公布号 JP5825470(B2) 申请公布日期 2015.12.02
申请号 JP20110109765 申请日期 2011.05.16
申请人 株式会社ブイ・テクノロジー 发明人 新井 敏成;橋本 和重
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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