| 摘要 |
<p>The present invention relates to a scanning electron microscope and to a method for using the scanning electron microscope to measure the current of primary and secondary electrons. The scanning electron microscope is characterised by comprising: a lens tube, having an accommodating space formed therein; a source, which is furnished inside the lens tube, facing a specimen on the outside of the lens tube, and which generates electrically charged primary electrons; a filter, which is furnished below the source inside the lens tube, and which alters the movement path of the primary electrons and secondary electrons, emitted after the primary electrons have collided with the specimen; a first detector, which is furnished inside the lens tube between the filter and the specimen, and which detects the current of the primary electrons, having an altered movement path due to an electromagnetic field generated by the filter; a second detector, which is furnished inside the lens tube between the source and the filter, and which detects the secondary electrons, having an altered movement path due to the filter; and a filter control unit which controls the filter so as to selectively alter the movement paths of the primary electrons and the secondary electrons. Thus, provided are a scanning electron microscope which ensures efficient detection operation and has a reduced overall device size, and a method for using the scanning electron microscope to measure the current of primary electrons.</p> |
