发明名称 |
ENGINEERING THE OPTICAL PROPERTIES OF AN INTEGRATED COMPUTATIONAL ELEMENT BY ION IMPLANTATION |
摘要 |
Systems and methods of engineering the optical properties of an optical Integrated Computational Element device using ion implantation during fabrication are provided. A system as disclosed herein includes a chamber, a material source contained within the chamber, an ion source configured to provide a high-energy ion beam, a substrate holder to support a multilayer stack of materials that form the Integrated Computational Element device, a measurement system, and a computational unit. The material source provides a material layer to the multilayer stack, and at least a portion of the ion beam is deposited in the material layer according to an optical value provided by the measurement system. |
申请公布号 |
EP2948978(A1) |
申请公布日期 |
2015.12.02 |
申请号 |
EP20140845029 |
申请日期 |
2014.04.24 |
申请人 |
HALLIBURTON ENERGY SERVICES, INC. |
发明人 |
PRICE, JAMES M.;NAYAK, ADITYA B.;PERKINS, DAVID L. |
分类号 |
H01L21/67;C23C14/48;G01B11/06;H01L21/285 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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