| 摘要 |
<p>A form measuring apparatus is provided for the purpose of reliably suppressing the influence of inadequate data on a measurement result. The form measuring apparatus includes: a projection section configured to project patterns having a common repetitive structure and differing in phase onto a measuring object in sequence, an imaging section configured to acquire a plurality of image data sets by taking an image of the measuring object with a different exposure light amount every time each of the patterns is projected onto the measuring object, a selection section configured to select a data set as an adequate data set in which all data fall within an effective brightness range over which the imaging section has linear input and output characteristics from the plurality of image data sets in each area on the measuring object, and a form calculation section configured to find a form of the each area based on the selected adequate data set.</p> |
