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发明名称
电浆处理腔室及其直流电极和加热装置的复合元件
摘要
本发明提供了一种电浆处理腔室及其直流电极和加热装置的复合元件,其中,所述电浆处理腔室下部包括一基台,基台下方设置有若干冷却液通道,在所述冷却液通道上方设置有一隔热层,其特征在于,在所述隔热层上方设置有绝缘层,在所述绝缘层上方设置有电热合金制成的复合元件,同时充当直流电极和加热装置。本发明提供的电浆处理腔室及其直流电极和加热装置的复合元件能够同时充当直流电极和加热装置,并且同时发挥两者的作用而不相互串扰,简化了机构,节约了能源。
申请公布号
TW201545199
申请公布日期
2015.12.01
申请号
TW103143958
申请日期
2014.12.16
申请人
中微半导体设备(上海)有限公司
发明人
张力;梁洁;左涛涛;贺 小明;倪 图强
分类号
H01J37/32(2006.01);H01J37/20(2006.01)
主分类号
H01J37/32(2006.01)
代理机构
代理人
林志青
主权项
地址
中国大陆 CN
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