Base material for growing single crystal diamond and method for producing single crystal diamond substrate

摘要

A base material for growing a single crystal diamond that includes at least a single crystal SiC substrate, and an iridium film or a rhodium film heteroepitaxially grown on a side of the single crystal SiC substrate where the single crystal diamond is to be grown. As a result, there is provided a base material for growing a single crystal diamond and a method for producing a single crystal diamond substrate which can grow the single crystal diamond having a large area and good crystallinity and produce a high quality single crystal diamond substrate at low cost.

主权项

1. A method for producing a single crystal diamond substrate comprising at least the steps of:
preparing a single crystal SiC substrate; heteroepitaxially growing a first film on an entire upper surface of the prepared single crystal SiC substrate, the first film being a MgO film that is used as a separation layer; heteroepitaxially growing a second film on an upper surface of the first film, the second film being an iridium film or a rhodium film; heteroepitaxially growing a single crystal diamond on an upper surface of the second film to obtain a laminated structure comprising the single crystal SiC substrate, the first film, the second film, and the heteroepitaxially grown single crystal diamond; and separating the heteroepitaxially grown single crystal diamond from the upper surface of the second film to obtain the single crystal diamond substrate; wherein the step of separating comprises:
separating the first film from the second film by immersing the laminated structure into a wet etching solution and etching the MgO film that was formed on the entire upper surface of the prepared single crystal SiC substrate, and then removing remaining second film from the single crystal diamond by mechanical polishing to obtain the single crystal diamond substrate.