附除害功能的真空泵;VACUUM PUMP WITH ABATEMENT FUNCTION

摘要

本发明的目的系在提供一种附除害功能的真空泵，其系废气处理之结果所析出之生成物不会逆流到制程腔体而可防止制程腔体的污染，且冲洗用气体与稀释用气体不含在废气中而可减少处理气体量，且减低除害部的气体处理所需之能源而可图谋省能源。;一种真空泵1，其系附设有处理废气之除害部，该真空泵1系由具备有于旋转轴S配置有复数个转子R1、R2、R3、R4、R5、R6之一对多段泵转子之乾式真空泵1所构成，且至少将一个处理废气之除害部3A、3B、3C连接在多段泵转子的段间。;A vacuum pump 1 is attached with an abatement section for processing exhaust gas. The vacuum pump 1 contains a dry vacuum pump 1, which has a pair of multi-stages pump rotors having multiple rotors R1, R2, R3, R4, R5, R6 disposed on a rotating shaft S thereof, and at least one abatement section 3A, 3B, 3C for processing exhaust gas is connected in between stages of the multi-stages pump rotors.