Method and structure for reducing light crosstalk in integrated circuit device

摘要

The present disclosure provides an integrated circuit device comprising a substrate having a back surface and a sensing region disposed in the substrate and being operable to sense radiation projected towards the back surface of the substrate. The device further includes a waveguide disposed over the back surface of the substrate. The waveguide is aligned with the sensing region such that the waveguide is operable to transmit the radiation towards the aligned sensing region. The waveguide includes a waveguide wall, and an inner region disposed adjacent to the waveguide wall. A diffractive index of the waveguide wall is less than a diffractive index of the inner region.

主权项

1. An integrated circuit device comprising:
a substrate having a back surface; a sensing region disposed in the substrate and operable to sense radiation projected towards the back surface of the substrate; a waveguide disposed over the back surface of the substrate, the waveguide being aligned with the sensing region such that the waveguide is operable to transmit the radiation towards the aligned sensing region; a color filter disposed over and aligned with the waveguide; and a lens disposed over and aligned with the color filter and the sensing region,
wherein the waveguide includes a pair of waveguide walls, and an inner region disposed adjacent to and between the waveguide walls,wherein the color filter is disposed over the inner region such that it does not extend directly over the pair of waveguide walls,wherein the lens is disposed over the inner region such that it does not extend directly over the pair of waveguide walls, andwherein a diffractive index of the waveguide walls is less than a diffractive index of the inner region.