三维有序微结构之制造方法以及自组装粒子之装置;MANUFACTURING METHOD OF THREE-DIMENSIONAL ORDERED MICRO-STRUCTURE AND DEVICE OF SELF-ASSEMBLING PARTICLE

摘要

一种三维有序微结构之制造方法包含：沈积多个粒子于一基板之一沈积表面；以沈积表面朝上平放基板；以及提供一第一重组电场以及一第二重组电场施加于基板，以驱动多个粒子自组装以形成一三维有序微结构，其中第一重组电场之电场方向是从基板之四周朝向基板，第二重组电场之电场方向是从基板之沈积表面侧朝向基板。依据上述制造方法可制作出连续性佳、高再现性且大面积之三维有序微结构。同时亦揭露一种应用于上述制造方法之自组装粒子之装置。; laying the substrate down by keeping the deposition surface up; and applying a first reassembling electric field and a second reassembling electric field to the substrate for driving the particles to self-assemble to form a three-dimensional ordered micro-structure, wherein the field direction of the first reassembling electric field is toward the substrate from the periphery of the substrate and the field direction of the second reassembling electric field is toward the substrate from the deposition surface side. According to the above manufacturing method, a three-dimensional ordered micro-structure with good continuity, high reproducibility and large area can be produced. A device of self-assembling particle applied to the above manufacturing method is also disclosed.