Substrate member and method of manufacturing chip

摘要

A substrate member includes a substrate and a plurality of chip regions formed on the substrate across a scribe line. Each of the plurality of chip regions includes a first region that has contact with the scribe line and in which a plurality of first pattern elements are formed, and a second region that is surrounded by the first region and in which a plurality of second pattern elements are formed. A minimum value of a size of the first pattern elements is greater than a minimum value of a size of the second pattern elements and/or a minimum value of an interval between adjacent first pattern elements is greater than a minimum value of an interval between adjacent second pattern elements.

主权项

1. A substrate member comprising:
a substrate, and a plurality of chip regions formed on the substrate across scribe lines, the chip regions being divided at the scribe lines to provide a plurality of chips, wherein each of the plurality of chip regions includes a first region that has contact with the scribe line and in which a plurality of first pattern elements constituting parts of the plurality of chips are formed, and a second region that is surrounded by the first region and in which a plurality of second pattern elements constituting other parts of the plurality of chips are formed, the first pattern elements and the second pattern elements having the same function as each other; and wherein a minimum value of a size of the first pattern elements is greater than a minimum value of a size of the second pattern elements and/or a minimum value of an interval between adjacent first pattern elements is greater than a minimum value of an interval between adjacent second pattern elements.