发明名称 Corrector
摘要 The present invention relates to a correcting device and, more particularly, a correcting device capable of efficiently performing a correction operation by heating the upper and lower sides of a molded wafer in a correction process. The correcting device according to the embodiment of the present invention includes a top plate which includes a first heater and a table which includes a second heater. The temperature of the first heater is higher than the temperature of the second heater.
申请公布号 SG10201503358U(A) 申请公布日期 2015.11.27
申请号 SG10201503358U 申请日期 2015.04.29
申请人 DYNA TECH CO., LTD. 发明人 JUNG, EUI SEON
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