| 发明名称 |
HYBRID PLASMA SOURCE |
| 摘要 |
Systems and methods for generating plasma are disclosed. A system for generating a plasma includes a helicon plasma source and an electron cyclotron resonance (ECR) plasma source structured and arranged together to generate a plasma in a tube. |
| 申请公布号 |
US2015342020(A1) |
申请公布日期 |
2015.11.26 |
| 申请号 |
US201414282361 |
申请日期 |
2014.05.20 |
| 申请人 |
King Abdulaziz City for Science and Technology |
发明人 |
HALA Ahmed M.;Oksuz Lutfi |
| 分类号 |
H05H1/46;H01J37/18;H01J37/244;H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system for generating a plasma, comprising:
a helicon plasma source and an electron cyclotron resonance (ECR) plasma source structured and arranged together to generate a plasma in a tube. |
| 地址 |
Riyadh SA |
