LASER PROCESSING UNIT AND PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser processing unit and a processing method which can monitor a base plate and selectively use the wave length of laser.SOLUTION: A laser processing unit 100 includes a laser part 110 which generates laser beam and diverges the laser beam; a scanner part 130 which has a plurality of scanners adjusting the advance direction of the laser beam, and provides a light path through which the laser beam passes; a guide part 120 which is provided between the laser part 110 and the scanner part 130, and selectively guides the diverged laser beam to the scanner; an irradiation part 140 which irradiates a base plate with the laser beam having passed through the scanner part 130; and a photo part 150 which takes a picture of the base plate.