| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjustment method of a crystal vibration element capable of shortening the time required for a frequency adjustment of the crystal vibration element.SOLUTION: The frequency adjustment method includes a mask preparation step and a dry etching step. In the mask preparation step, a frequency reduction region 11 in which an oscillation frequency becomes low, within a crystal wafer 10 is investigated beforehand and a mask 20 is prepared which includes an opening 21 corresponding to the frequency reduction region 11. In the dry etching step, dry etching is applied to the crystal wafer 10 by using the mask 20, such that a part of the crystal wafer 10 in the frequency reduction region 11 is scraped off. |
