ANALYZING APPARATUS AND CALIBRATION METHOD

摘要

Calibration of an analyzing apparatus is performed using appropriate calibration data that reflects actual measurement conditions. The analyzing apparatus includes an emission unit, a collection filter, a calibration base material, a detection unit, and a composition analysis unit. The emission unit emits an exciting X-ray to generate a fluorescent X-ray by exciting particulate matter. The collection filter collects the particulate matter. The calibration base material is provided in a measurement area together with the collection filter when performing the calibration. The detection unit detects X-rays generated from the measurement area. The detection unit detects a calibration X-ray when performing the calibration. The composition analysis unit generates calibration data by using the calibration X-ray when performing the calibration. The composition analysis unit analyzes compositions of the particulate matter based on the calibration data and a measured X-ray detected by the detection unit when analyzing the compositions of the particulate matter.

主权项

1. An analyzing apparatus for analyzing compositions of particulate matter based on a fluorescent X-ray generated from the particulate matter, the analyzing apparatus comprising:
an emission unit configured to emit an exciting X-ray, the exciting X-ray exciting the particulate matter to generate the fluorescent X-ray; a collection filter configured to collect the particulate matter; a calibration base material provided together with the collection filter in a measurement area to which the exciting X-ray is emitted when performing a calibration; a detection unit configured to detect an X-ray generated from the measurement area, the detection unit detecting a calibration X-ray generated from the measurement area by emitting the exciting X-ray to the collection filter and the calibration base material when performing the calibration; and a composition analysis unit configured to generate calibration data by using the calibration X-ray when performing the calibration, and analyze the compositions of the particulate matter based on the calibration data and a measured value of X-ray detected by the detection unit when analyzing the compositions of the particulate matter.