| 摘要 |
The present invention makes it possible to produce a highly stable inertia sensor having a simple configuration by sealing an oscillator for detecting acceleration in a vacuum and using resonant vibration that takes advantage of the high Q value of MEMS devices. An inertia sensor has: a detection weight and beam (105) for detecting acceleration, a drive electrode (106) for causing the detection weight and beam (105) to vibrate, a resonance frequency adjustment electrode (108) for changing the resonance frequency of the detection weight and beam (105), and a detection circuit for, when acceleration is applied to the detection weight and beam (105) while the detection weight and beam (105) is vibrating as a result of the application of voltage to the detection weight and beam (105), applying, to the resonance frequency adjustment electrode (108), a voltage for changing the resonance frequency in a direction cancelling the change in the resonance frequency of the detection weight and beam (105) (frequency control unit (433), DAC unit (436)) and outputting acceleration on the basis of the value of the voltage applied to the resonance frequency adjustment electrode (108) (CV conversion unit (430), ADC unit (431), synchronous detection unit (432), frequency control unit (433), signal adjustment unit (435)). |
