OPTIMISED METHOD FOR PRODUCING ELECTROLUMINESCENT NANOWIRES

摘要

A process for fabricating an array of nanowires on the surface of a substrate, the nanowires comprising a portion capable of emitting radiation under action of an electrical or optical control and at least partially connected to one another electrically via a conductive upper layer, comprises steps allowing a subset of defective nanowires to be identified among active nanowires, the steps comprising: producing a layer of negative photoresist sensitive to the emission wavelength, covering the array of the nanowires; activating the array of the nanowires under electrical control or optical control so the active nanowires emit the radiation, the radiation decreasing the solubility of the negative resist; developing the resist level with the defective nanowires, leaving zones made less soluble and encircling the active nanowires; and removing the conductive layer above the defective nanowires. A process for fabricating one or more light-emitting diodes using the process is provided.

主权项

1. A process for fabricating an array of nanowires on the surface of a substrate, said nanowires comprising a portion capable of emitting radiation at at least one wavelength under the action of an electrical or optical control and being at least partially connected to one another electrically via a conductive upper layer, comprising steps allowing a subset of defective nanowires to be identified among active nanowires, said steps comprising:
producing a layer of negative photoresist sensitive to said emission wavelength, covering the array of said nanowires; activating the array of said nanowires under electrical control or optical control, so that said active nanowires emit said radiation, said radiation decreasing the solubility of said negative resist; developing said resist level with the defective nanowires, leaving zones made less soluble and encircling said active nanowires; and removing said conductive layer above said defective nanowires.