发明名称 |
IN-SITU SPECTROSCOPY FOR MONITORING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS |
摘要 |
Technologies are described for monitoring characteristics of layers of integrated computational elements (ICEs) during fabrication using an in-situ spectrometer operated in step-scan mode in combination with lock-in or time-gated detection. As part of the step-scan mode, a wavelength selecting element of the spectrometer is discretely scanned to provide spectrally different instances of probe-light, such that each of the spectrally different instances of the probe-light is provided for a finite time interval. Additionally, an instance of the probe-light interacted during the finite time interval with the ICE layers includes a modulation that is being detected by the lock-in or time-gated detection over the finite time interval. |
申请公布号 |
EP2946197(A1) |
申请公布日期 |
2015.11.25 |
申请号 |
EP20140824758 |
申请日期 |
2014.02.14 |
申请人 |
HALLIBURTON ENERGY SERVICES, INC. |
发明人 |
PRICE, JAMES M.;NAYAK, ADITYA B.;PERKINS, DAVID L. |
分类号 |
G01N21/41;B29D11/00;E21B49/00;G01B11/06;G01J3/28;G01N21/31;G01N21/84;G02B5/28;G05B19/4099 |
主分类号 |
G01N21/41 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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