| 摘要 |
<p>A thin film charged body sensor for sensing a contact and/or non-contact movement of a charged body based on an electric field of the charged body. The thin film charged body sensor may include a substrate, a first thin film transistor unit on the substrate, and including a gate layer, an active layer insulated from the gate layer, and source/drain layers insulated from the gate layer and connected to the active layer; and a thin film antenna unit on the substrate, and including a first film including a conductive material electrically connected to the gate layer, the thin film antenna unit adapted to generate an input current in response to an electric field of a charged body.</p> |
