发明名称 METROLOGY DEVICE AND METROLOGY METHOD
摘要 PROBLEM TO BE SOLVED: To quickly meter a three-dimensional shape of an object by removing an influence of internal scattering of the object including a semi-transparent part due to a projection of patterns.SOLUTION: A metrology device comprises: an image input unit 204 that acquires a plurality of photographing images in which a plurality of patterns to be projected time-series by a projection device 101, and including a plurality of prescribed-width broken lines having brightness and darkness repeated in a long-side direction almost orthogonal to a base line defined by a line segment connecting an optical center of the projection device 101 and an optical center of a photographing device 102 is photographed by the photographing device 102; a broken line identification unit 302 that identifies a plurality of broken lines on the basis of a combination of the brightness and darkness in the plurality of photographing images; and a coordinate detection unit 303 that detects an association relationship between a projection coordinate of the plurality of broken lines and an image coordinate of the plurality of broken lines in the photographing image on the basis of information about the plurality of patterns and an identification result of the plurality of broken lines.
申请公布号 JP2015210192(A) 申请公布日期 2015.11.24
申请号 JP20140092001 申请日期 2014.04.25
申请人 CANON INC 发明人 YAMAZAKI MASAYOSHI;KOBAYASHI TOSHIHIRO;HIGO TOMOAKI
分类号 G01B11/25 主分类号 G01B11/25
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