发明名称 Optical element unit
摘要 An optical element unit is provided comprising an optical element group for projecting light along an optical axis of the optical element group and a housing having an inner housing part partly defining a first space and a light passageway between the inner housing part and a second space. The inner housing part receives the optical element group. The optical element group comprises an ultimate optical element located in the region of the light passageway. A load-relieving device is provided adjacent to the ultimate optical element, the load relieving device partly defining the first space and the second space and at least partly relieving the ultimate optical element from loads resulting from pressure differences between the first space.
申请公布号 US9195025(B2) 申请公布日期 2015.11.24
申请号 US201414484502 申请日期 2014.09.12
申请人 Carl Zeiss SMT GmbH 发明人 Lippert Johannes
分类号 G02B7/02;G03G15/04;G02B7/182 主分类号 G02B7/02
代理机构 Fish & Richardson P.C. 代理人 Fish & Richardson P.C.
主权项 1. An optical element unit, comprising: an optical element group configured to provide light along an optical axis of the optical element group, the optical element group comprising an ultimate optical element comprising an optically used surface when the optical element provides light along the optical axis of the optical element group; a support structure comprising an inner part partially defining a first space and a light passageway between the first space and a second space, the inner part receiving the optical element group such that the ultimate optical element is located in a region of the light passageway; a cover device; and a holding device which is a component separate from the cover device, wherein: the ultimate optical element is connected to the support structure by the holding device;the cover device is connected to the holding device;the cover device extends between the holding device and a first surface of the ultimate optical element;the cover device does not cover a first part of the first surface of the ultimate optical element uncovered;the cover device covers a second part of the first surface of the ultimate optical element.
地址 Oberkochen DE