Method for producing three-dimensional integrated circuit structure

摘要

A three-dimensional integrateds circuit structure includes a first metal circuit substrate, an interposer substrate disposed on the first metal circuit substrate and electrically connected therewith, and at least one semiconductor component disposed on the interposer substrate. The interposer substrate is used to dissipate the heat generated by the operation of the semiconductor components, so as to achieve the objective of increasing the lifespan of the semiconductor components.

主权项

1. A method for producing three-dimensional integrated circuit structure, comprising the steps of:
providing a substrate with a single piece first metal circuit layer directly formed on one side of the substrate; providing an interposer substrate with a single piece second metal circuit layer directly formed on a side of the interposer substrate opposite to the side of the substrate where the single piece first metal circuit layer is disposed on, the interposer substrate including a plurality of through holes filled with conductors, wherein the single piece first metal circuit layer is provided between the substrate and the interposer substrate; forming a plurality of conductive pads on a first surface, facing the single piece first metal circuit layer, of the interposer substrate, wherein the plurality of conductive pads are formed on the same side of the substrate as the single piece first metal circuit layer and directly contact the single piece first metal circuit layer; forming a single piece second metal circuit layer on a second surface, opposite to the first surface, of the interposer substrate; and placing at least one semiconductor component on the interposer substrate, wherein the at least one semiconductor component is electrically connected to the single piece second metal circuit layer, whereby the interposer substrate is able to be used to dissipate heat generated by operation of the at least one semiconductor component and avoid electricity leakage generated by the at least one semiconductor component in high temperature state, wherein the single piece first metal circuit layer electrically connects the plurality of conductive pads on the first surface of the substrate, and the single piece second metal circuit layer electrically connects the conductors filled in the plurality of through holes in the interposer substrate, and wherein each of the plurality of conductive pads is electrically connected to each of the conductors filled in the plurality of through holes by the single piece first metal circuit layer.