发明名称 保持具
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a low-cost holder capable of bringing pads into contact with a workpiece surface at positions free from a contact problem. <P>SOLUTION: The holder holds, by using Bernoulli's principle, the workpiece W on a holding surface 1a provided for a body and includes a support member projecting outward from the body. This support member has a plurality of pads 12 for holding a clearance between the holding surface 1a and workpiece W in contact with the workpiece W. The pads 12 do not contact the inside of the workpiece W projecting outward from the body. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5822438(B2) 申请公布日期 2015.11.24
申请号 JP20100139772 申请日期 2010.06.18
申请人 发明人
分类号 B25J15/06;B23Q3/08;B23Q3/18;B23Q7/04;B25B11/00;B65G49/07;H01L21/677 主分类号 B25J15/06
代理机构 代理人
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