| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To properly separate a carrier, such as a blanket carrying a pattern, from a substrate, in a pattern transfer technique for transferring a pattern on the carrier to the substrate by separating the carrier and the substrate in contact with each other. <P>SOLUTION: After a blanket BL and a substrate SB are partially separated at corners of a contact region CP between the blanket BL and substrate SB by moving the blanket BL and substrate SB away from each other at a first separation speed V1 at the start of separation (first process), the separation speed is changed to a second separation speed V2 slower than the first separation speed V1 after the partial separation. The substrate SB is moved away from the blanket BL at the second separation speed V2 until at least the contact region CP draws an arc, thereby facilitating separation between the blanket BL and the substrate SB (second process). <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
