APPARATUS AND METHOD FOR TESTING A SUBSTRATE

摘要

The present invention provides a substrate inspection apparatus and a substrate inspection method, wherein the apparatus comprises: a lifting/lowering assembly having a plurality of lifting/lowering members vertically movable; an inspection member supported by at least one lifting/lowering member among the lifting/lowering members to be attachable and detachable, and having a probe on one surface facing a stage; and a connection member installed in other lifting/lowering member among the lifting/lowering members and having a connection terminal formed to face the inspection member. The method comprises the steps of: disassembling the connection member and the inspection member; unloading the inspection member and loading other inspection member; assembling the connection member with the other inspection member; and inspecting a substrate under inspection by the other inspection member assembled with the connection member, thereby easily exchanging the inspection members which apply an inspection signal to an electrode of the substrate in a process of inspecting the substrate.