| 摘要 |
PROBLEM TO BE SOLVED: To provide a multipole lens capable of generating magnetostatic fields of different strengths in a direction of travel of an electron beam.SOLUTION: A multipole lens 100 includes structures 10a, 10b and 10c including yokes 14a, 14b and 14c, base parts 13a, 13b and 13c magnetically connected to the yokes 14a, 14b and 14c and poles 12a, 12b and 12c including distal end portions 11a, 11b and 11c magnetically connected to the base parts 13a, 13b and 13c. A plurality of structures 10a, 10b and 10c are laminated and between the distal end portions 11a, 11b, 11c being adjacent in a direction of lamination of the structures 10a, 10b and 10c, magnetic field separation parts 20 and 22 formed from nonmagnetic substances are provided. |
