FILTER ASSEMBLY FOR SAMPLING FOR TRANSMISSION ELECTRON MICROSCOPE ANALYSIS AND MANUFACTURING DEVICE THEREOF

摘要

The present invention relates to a filter assembly for sampling for transmission electron microscope analysis and a manufacturing device thereof. The filter assembly according to an embodiment of the present invention includes a filter, a filter support on which a grid penetrating the filter is installed and which includes holes; a filter housing in which the filer, the grid, and the filter supporter are installed, and which includes an exhaust hole for fluid, and a filter ring which pushes the filter installed in the filter housing and the edge of the filter to fix the filter.