| 摘要 |
PROBLEM TO BE SOLVED: To increase a cross-sectional area of a leak passage by sufficient and large elastic deformation of an elastic partitioning member in opening a relief valve, with respect to the elastic partitioning member in which the relief valve is integrally disposed to a movable film outer peripheral portion for supporting an outer periphery of an elastic movable film.SOLUTION: An elastic movable film 32, a thick movable film outer peripheral portion 34 surrounding an outer periphery of the elastic movable film, and a relief valve 36 projecting outward from the movable film outer peripheral portion 34, are integrally disposed on a circular elastic partitioning member 30. An upper circular arc-shaped projecting portion 34b projecting upward, is disposed on an upper portion of the movable film outer peripheral portion 34, and fixed by a fixing portion 29e disposed on an upper member 20a configuring a partitioning portion 20. Further a neighborhood portion of a base portion 52 of the relief valve 36 is formed as a linear non-supporting portion 34a being flush with the elastic movable film 32, and the base portion 52 is formed into the linear shape along the non-supporting portion 34a. The relief valve 36 in opening is easily bent by the linear base portion 52, and can be largely elastically deformed to the above of the non-supporting portion 34a. |
