| 摘要 |
In corner sections of a first quadrant, a second quadrant, a third quadrant and a fourth quadrant whose origin point is a center of an upper surface of a stage (WST1), three each of two-dimensional heads (60 i , 60 ia , 60i b (i=1 to 4)) are provided. Stage (WST1) is driven, while measuring a position of stage (WST1) using three heads (60 i ) that face a two-dimensional grating (RG) of a scale plate (21) provided above the stage (WST1) from four heads (60 i (i=1, 2, 3, 4)), and during the driving, difference data of measurement values in a measurement direction are taken in for two remaining heads (60 ia , 60 ib ) of a head group (61 i ) having the three each of heads to which the three heads (60 i ) belong, respectively, and using the difference data, grid errors in the measurement direction of two-dimensional grating (RG) are calibrated. |
